SENSOR SOLUTIONS

MEMS Air/Gas Mass Flow Sensors get Application-Specific Enhancements

MEMS based sensors are already being used in a variety of applications for precision mass flow measurement. Now Omron has widened the boundaries by adding new application-specific models to its D6F range of sensors.



Three new models in the family enable their use in applications including medical, spectroscopy, scientific/test equipment and industrial process control.

The new D6F-03A3-000 is aimed at industrial applications, especially monitoring systems for pressurised cables and pick-and-place machines in industrial automation. It offers high-precision monitoring of airflow at flow rates of up to 3 Litres Per Minute (LPM). Advantages of this new solution include a compact size of just 37mm x 8mm x 17mm, allowing its use in bypass configurations to measure higher total air/gas mass flow rates. Current draw is just 15mA, and the device exhibits stable amplified analogue output across the full scale.



The company is also offering its higher flow rate series with an RC¼ screw port style connection. The new A6 range, designated as D6F-10A6-000, D6F-20A6-000 and D6F-50A6-000, shares the other features of the existing A5 sensors. It is suitable for measuring mass flow velocity and mass flow rate movement with highly repeatable accuracy, at flow rates of up to 10LPM, 20LPM and 50LPM respectively. Both the A5 and A6 style sensors give precise detection of mass flows with a high repeatability of up to ±0.1% and an accuracy of ±3% Full Scale Deflection.

The third addition to the range, the D6F-V03A1, is a highly efficient, low cost MEMS flow velocity sensor designed for applications such as building ventilation, clogged air intake filter detection and general detection of correct fan function. It has a compact size of 24mm x 14mm x 8mm and can measure air flow velocity from zero to 3m/sec with an accuracy of ±10% FSD. The sensor’s key attribute is its built-in Dust Segregation System (DSS) which separates up to 99.5% of dry airborne particulate matter (simulation result) helping to maintain the performance characteristics of the sensor over its lifetime.



Omron is also offering its MEMS flow sensor chip technology as a module, for easier integration into OEM type applications.

Features

• Application-specific MEMS air/gas flow sensors
• Industrial version
  • Flow rates of up to 3LPM
  • Compact size just 37mm x 8mm x 17mm
  • Current draw only 15mA
  • Stable analogue output across the full scale
• RC¼ screw port version
  • High 10LPM, 20LPM and 50LPM flow versions
  • High repeatability of up to ±0.1%
  • Accuracy of ±3% FSD
• Low-cost, high-efficiency version
  • Compact size: 24mm x 14mm x 8mm
  • Air flow velocity from zero to 3m/sec
  • Accuracy ±10% FSD
  • Built-in Dust Segregation System (DSS)

Applications

• Medical
• Spectroscopy
• Scientific/test equipment
• Industrial process control
  • Pick-and-place machines
• HVAC systems
  • Air intake monitoring
  • Correct fan function

For further information, including the Omron D6F Brochure, please click here