SENSOR SOLUTIONS

Mass Flow Sensors Measure Whispers and Tornados

Accurate electronic measurement of the flow rate of gases is required to satisfy a range of trends in product design. Omron’s MEMS technology enables sensor chips that can measure flow rates from the tiniest breath to a tornado.



Product design trends, including pressure for higher efficiency from industrial processes, building HVAC systems and increased use of electronics in medical treatment, demand accurate flow rate measurements. Omron’s D6F family is suitable for use with a non-corrosive gas or air and capable of measuring flow rates from one mm to 40 meters per second or 1LPM to 50LPM.

The range includes more than 20 different gas flow and airflow sensor models, with a repeatability of up to ±0.1% and accuracy up to ±3% of full scale deflection. For substantial orders, Omron will calibrate the sensors to individual customer requirements.

The D6F-V, D6F-W and D6F-P units feature a patent-pending dust segregation system and suit detection of clogged air intake filters in ventilation and cooling systems.

D6F flow sensors measure gas velocity and mass flow rate using a proprietary 3D MEMS structure that gives outstanding performance in terms of resolution and repeatability, even at very low flow rates.

They integrate a pair of thermopiles and a miniature heater element in a sensor chip measuring 1.55mm x 1.55mm and 0.4mm thick. The chip is oriented with the direction of flow, with one thermopile positioned upstream and one downstream of the heater element. The difference in temperature, and hence the difference in electrical output, between the two thermopiles is dependent on the cooling effect of the flow. This information enables accurate, high-resolution calculation of the rate of flow. It is possible to measure airflow of 1mm/s using a MEMS flow-sensor chip and the sensors are able to respond to changes in flow rate in less than 5ms.

Features

• MEMS based flow rate sensors
• Velocity from 1mm/s to 40m/s: flow rate 1LPM to 50LPM
• Accurate and precise
  • Repeatability up to ± 0.1%
  • Accuracy to ±3% full scale deflection
• Compatible with most non-corrosive gases and air
• Choice of uni and bi-directional flow options
• Dust segregation system (D6F-V, D6F-w and D6F-P)
• Highly compact
• Maintenance free solution

Applications

• Industrial control: plasma generator, particle counter, process control, pressurised cable monitoring, gas welding machine, etc.
• Heating, ventilating and air conditioning: space heaters, dehumidifiers
• Server cooling
• Medical: spirometry, chest drainage, ventilator, anaesthetic device, oxygen concentrator, etc.
• Building automation: gas metering and leak detection, ventilation, boiler/combustion control, smoke detector, etc.

For further information, including the Omron Product Catalogue and CD ROM, please click here